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Laboratory-Scale Vacuum Crystallization System
Application Scope:
Designed for perovskite solar cell R&D, this equipment performs drying and crystallization of functional layers after coating. It is also compatible with laboratory-scale drying and small-batch processing for other wet-film semiconductor applications, such as LCD panels, touch screens, optical films, and advanced packaging.
Technical Specifications:
Compatible Substrate Size：100×100 mm to 400×400 mm (including silicon wafers)
Chamber Dimensions：240mm×240mm×80mm ~ 450mm×450mm×120mm
Vacuum Rate：Standard 10s to 10Pa; Optional: 30s to 1Pa, 5s to 10Pa, 3s to 150Pa
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Production-Line Vacuum Crystallization Machine
Application Scope:
Designed for perovskite solar cell production lines, this system performs drying and crystallization of coated functional layers, including perovskite, passivation, and SAM layers. It also meets precision drying requirements for other wet-film semiconductor applications such as LCD panels, touch screens, optical films, and advanced packaging.
Technical Specifications:
Chamber Dimensions：1350mm×650mm×100mm ~ 2600mm×1350mm×150mm
Vacuum Rate：Standard 10s to 10Pa; Optional: 2s to 150Pa, 3s to 150Pa, 5s to 10Pa
Production Cycle：~ 1 PPM (requires high-speed loading/unloading system)
