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Laboratory-Scale Vacuum Crystallization System
Application Scope:
Designed for perovskite solar cell R&D, this equipment performs drying and crystallization of functional layers after coating. It is also compatible with laboratory-scale drying and small-batch processing for other wet-film semiconductor applications, such as LCD panels, touch screens, optical films, and advanced packaging.
Technical Specifications:
Compatible Substrate Size：100×100 mm to 400×400 mm (including silicon wafers)
Chamber Dimensions：240mm×240mm×80mm ~ 450mm×450mm×120mm
Vacuum Rate：Standard 10s to 10Pa; Optional: 30s to 1Pa, 5s to 10Pa, 3s to 150Pa
