Designed for laboratory preparation of perovskite layers, passivation layers, SAM, and other functional layers for perovskite solar cells. Also applicable to wet-film processing in broader semiconductor applications, including LCD panels, touchscreens, optical films, and advanced packaging products.
Substrate Dimension Range:200mm×200mm~400mm×400mm
Wet Coating Thickness:≥3μm
Dry Film Thickness Uniformity:±3%(@500nm)
aximum Coating Speed:100mm/s
Designed for perovskite solar cell production lines, enabling precise deposition of perovskite layers, passivation layers, SAM layers, and other functional coatings. Also compatible with wet-film processes in the broader semiconductor industry, including LCD panels, touchscreens, optical films, and advanced packaging.
Substrate Coverage:600mm×600mm~ 2400mm×1200mm
Wet Coating Thickness:≥3μm
Dry Film Uniformity:±5%(@500nm)
Maximum Coating Speed:80mm/s
Production Rate:~1 PPM (with high-speed loading/unloading system)
Designed for production lines or laboratory use, enabling precise deposition of perovskite layers, passivation layers, SAM layers, and other functional coatings for crystalline silicon tandem perovskite solar cells.
Substrate Compatibility:166×166 mm, 182×182 mm, 182×91 mm, 182×210 mm, 210×210 mm, 210×105 mm silicon wafers
Wet Coating Thickness: ≥3μm
Dry Film Uniformity:±5%(@1000nm)
Maximum Coating Speed:100mm/s
Designed for perovskite solar cell R&D, this equipment performs drying and crystallization of functional layers after coating. It is also compatible with laboratory-scale drying and small-batch processing for other wet-film semiconductor applications, such as LCD panels, touch screens, optical films, and advanced packaging.
Compatible Substrate Size:100×100 mm to 400×400 mm (including silicon wafers)
Chamber Dimensions:240mm×240mm×80mm ~ 450mm×450mm×120mm
Vacuum Rate:Standard 10s to 10Pa; Optional: 30s to 1Pa, 5s to 10Pa, 3s to 150Pa
Designed for perovskite solar cell production lines, this system performs drying and crystallization of coated functional layers, including perovskite, passivation, and SAM layers. It also meets precision drying requirements for other wet-film semiconductor applications such as LCD panels, touch screens, optical films, and advanced packaging.
Chamber Dimensions:1350mm×650mm×100mm ~ 2600mm×1350mm×150mm
Vacuum Rate:Standard 10s to 10Pa; Optional: 2s to 150Pa, 3s to 150Pa, 5s to 10Pa
Production Cycle:~ 1 PPM (requires high-speed loading/unloading system)
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Sales Email:sales.lhi@leadintelligent.com
After-sales / Complaint Service Email:service_lhi@leadintelligent.com
Contact Address:No. 58, Xinmei Road, Xinwu District, Wuxi City, Jiangsu Province
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