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  • Laboratory-Scale Perovskite Planar Coating System
    Laboratory-Scale Perovskite Planar Coating System
    Application Scope:

    Designed for laboratory preparation of perovskite layers, passivation layers, SAM, and other functional layers for perovskite solar cells. Also applicable  to wet-film processing in broader semiconductor  applications, including LCD panels, touchscreens,  optical films, and advanced packaging products.

    Technical Specifications:

    Substrate Dimension Range:200mm×200mm~400mm×400mm

    Wet Coating Thickness:≥3μm

    Dry Film Thickness Uniformity:±3%(@500nm)

    aximum Coating Speed:100mm/s

  • Production-Line Perovskite Planar Coating Machine
    Production-Line Perovskite Planar Coating Machine
    Application Scope:

    Designed for perovskite solar cell production lines, enabling precise deposition of perovskite layers,  passivation layers, SAM layers, and other functional  coatings. Also compatible with wet-film processes  in the broader semiconductor industry, including  LCD panels, touchscreens, optical films, and advanced  packaging.

    Technical Specifications:

    Substrate Coverage:600mm×600mm~ 2400mm×1200mm

    Wet Coating Thickness:≥3μm

    Dry Film Uniformity:±5%(@500nm)

    Maximum Coating Speed:80mm/s

    Production Rate:~1 PPM (with high-speed loading/unloading system)

  • Crystalline Silicon Tandem Perovskite Planar Coating Equipment
    Crystalline Silicon Tandem Perovskite Planar Coating Equipment
    Application Scope:

    Designed for production lines or laboratory use, enabling precise deposition of perovskite  layers, passivation layers, SAM layers, and other functional coatings for crystalline silicon  tandem perovskite solar cells.

    Technical Specifications:

    Substrate Compatibility:166×166 mm, 182×182 mm, 182×91 mm, 182×210 mm, 210×210 mm, 210×105 mm silicon wafers

    Wet Coating Thickness: ≥3μm

    Dry Film Uniformity:±5%(@1000nm)

    Maximum Coating Speed:100mm/s

  • Laboratory-Scale Vacuum Crystallization System
    Laboratory-Scale Vacuum Crystallization System
    Application Scope:

    Designed for perovskite solar cell R&D, this equipment performs drying and  crystallization of functional layers after coating. It is also compatible with  laboratory-scale drying and small-batch processing for other wet-film  semiconductor applications, such as LCD panels, touch screens, optical  films, and advanced packaging.

    Technical Specifications:

    Compatible Substrate Size:100×100 mm to 400×400 mm (including silicon wafers)

    Chamber Dimensions:240mm×240mm×80mm ~ 450mm×450mm×120mm
    Vacuum Rate:Standard 10s to 10Pa; Optional: 30s to 1Pa, 5s to 10Pa, 3s to 150Pa

  • Production-Line Vacuum Crystallization Machine
    Production-Line Vacuum Crystallization Machine
    Application Scope:

    Designed for perovskite solar cell production lines, this system performs  drying and crystallization of coated functional layers, including perovskite,  passivation, and SAM layers. It also meets precision drying requirements  for other wet-film semiconductor applications such as LCD panels, touch  screens, optical films, and advanced packaging.

    Technical Specifications:

    Chamber Dimensions:1350mm×650mm×100mm ~ 2600mm×1350mm×150mm
    Vacuum Rate:Standard 10s to 10Pa; Optional: 2s to 150Pa, 3s to 150Pa, 5s to 10Pa

    Production Cycle:~ 1 PPM (requires high-speed loading/unloading system)

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